Michael Greer Email & Phone Number

Inpria is a startup in photolithography resist materials. I've worked at Inpria US and currently at imec [Belgium] as an Industrial Assignee. My main focus is method development on intractable metrology and analytical problems, developing end-to-end solutions. Analytical expertise: ASML NXE3300, Nicolet FTIR spectroscopy, KLA Aleris + Woollam VASE ellipsometry, FEI / Zeiss analytical SEM, Hitachi CD-SEM, Development Rate Monitor (DRM), e-beam lithography + imaging.Software / modeling expertise: optical design (Zemax), illumination analysis (TracePro), thin film design (TFCalc), world-class Excel developer (VBA / Powerpivot), FTIR spectroscopy(Omnic macros), ImageJ scripting, JMP scripting.

Corvallis, Or

Dual role in R&D as Photolithography Engineer and Optical Design Engineer. Photolithography Engineer:• Maintained image quality (CD, reg) and process quality (Cpk) of photocells in IC production fab. • Designed and execute fab characterization experiments and margin studies. • Possess in depth knowledge of photolithography concepts including: critical dimensions, swing curves, distortion, ACLV, diffraction, wafer scaling, field rotation, DOF, biasing, energy to clear. Optical Design Engineer:• Designed illumination and projection lenses using Zemax. Fitted to off-the-shelf lenses.• Designed projector enclosure, lens mounting, and assembled prototype.• Quantified photometric performance: color coordinates, luminance, spatial and angular brightness uniformity, color transfer curves, and contrast ratio.• 2 US Patents for projector optical designs (ex. 6,980,346 Projector with Intensity Color Modulator)

Portland, Oregon Area

• Evaluated lens designs using OSLO and performed illumination analysis using Tracepro. • Gained a practical understanding of numerical aperture, etendue, solid angle, lens aberrations, modulation transfer function, merit function, spectral response, photometry, and diffraction effects. • Designed thin film coatings with TFCALC.• Measured / characterized numerous optical components: microdisplays, holographic coatings, wave plates, PBS cubes, fly-eye arrays, lightpipes, interference filters, arc lamps, CRTs, integrating spheres, and LCOS/AMLCD micro displays.

Master Of Science - Ms, Physics

Bachelor Of Science - Bs, Physics / Optics