Aaron Vanderpool Email & Phone Number

Chandler, Az

It turns out the pastures were not much greener just more secure. I began life at Intel in F12 Implant working on an 8" 0.18 micron technology as I started a Ph.D. in Materials Science at ASU part time. We converted the factory to 12" in 2004 while I was in Portland learning the 65nm technology for 18 months and working on my Dissertation. I graduated from ASU in December 2006. I returned from Portland to sustain the AMAT QuantumX toolset until October 2010 when I had a chance to move next door to F32. Until June 2012 I worked on sustaining the 32nm process on the Varian Vista HCi toolset. Then I began helping with the 22nm process on the same toolset. In July 2013 I got to go back to Portland for 6 months to learn and then transfer the 14nm Implant process back to F32. In 2019 I helped transition the factory to the 10nm process. In 2021 I began leading an integrated engineering team tasked with defect reduction across the Metal Gate section of the line. Then in the summer of 2024 I went back to Oregon to work on transferring the 18A Implant process to Arizona. My passions surround using the vast capabilities of Ion Implantation to enhance device performance and Yield by modifying material characteristics. The success I have had improving our process flow has been exciting. I have also had multiple opportunities to explore the corners of our processing space to resolve Implant problems in various taskforces. The key to both of these facets of my work has been using model based problem solving and applying a first principles approach to the interaction of ion beams with device structures.

I started at Motorola in BP2 working as a night shift weekend Photolithography operator on 4" Bipolar wafers at the Broadway plant in Mesa, AZ while I was attending ASU full time during the day working on a BS in Physics. 6 months later I got a Process Tech position in ACT (a small RF BiCMOS development group) at the same location working on various CDV and RIE tools. Here I rushed to finish my BS at ASU in Aug. 1996 and was made a Process Engineer over the same toolsets immediately afterwards. ACT allowed me to continue working the weekend night shift while I worked on my MS in Materials Science at ASU during the week. When ACT was shut down in Jan. 1998 I was reassigned to MOS 6, a 6" BiCMOS fab, at the same location on day shift and within a few months I was made the sole Implant engineer due to attrition in the group. As I tried to learn the basics of Implant I was run ragged supporting 4 AMAT 9500's, 2 Varian E500's, 3 80 XP's, and 2 300 XP's running over 400 production recipes because of the large number of low volume products the fab produced. Fortunately, I was able to continue my MS part time at MOS 6 through the ASU distance learning center. Just as I finished my MS I could see that MOS 6 (and the whole Broadway Plant) had a limited life and left for greener Intel pastures across town in Chandler, AZ in 2000.

Ph.D., Materials Science

Ms, Materials Science

Bs, Physics