Alvin Li Email and Phone Number

Etch Process R&D Engineer

I experienced over 12 Epitaxial tools startup and N20/N16 process Tier2 verification that is not only meet our BKM, but also meet customization process requirements of their monitors. Familiar with metrology tool of technical analysis to check for defects such as SEM, TEM and SIMS. Help customer to solve issue and maintain good relations of cooperation with them, also work together with our headquarters (AMAT) technical product engineer and R&Ds to solve customers’ issues.Epitaxial Process Support Engineer – TSMC account team July 2014 - 2016My success is reflected in the continual assignment of follows:1. N16/N20 Epitaxial module process engineers for TSMC, responsible for customer Tier2 process verification. Help customers to solve the follow-up offline/inline process and the extension of the correlation issues.2. Presentation of new imported technologies, and work closely with customers to develop improvement plans.3. Troubleshooting: Mutual cooperation with our customers; provide the necessary diagnostic, and give customers the appropriate suggestion.ADVANCE PROJECT：1. Advanced Multiple Temperature Calibration Method in Blackbody radiation theory calculation model. It has been accepted by customer in the N10 advanced process.2. SiCoNi chamber: Developing valuable adjustable process parameters for tuning etch amount profile.3. Studying of Epitaxial dopant concentration on Source/Drain Epitaxial process for SIMS mismatch issue.