Andrei Uvarov Email & Phone Number

Grenoble, FR

Grenoble, Auvergne-Rhône-Alpes, France

Grenoble Area, France

• Developped plasma process and equipment (etching and deposition).
• Tailored standard products to create customer-specific solutions.
• Led process engineering team.
• Collaborated closely with customers for clear definition of project goals.
• Developped and embedded customer demonstration framework.

Russian Federation

Courses: Introduction to Microsystems Materials and Technology; Technology of Nanomaterials and Nanosystems

Russia

• Developed ICP tool for R&D in semiconductor etching: concept evaluation, RF circuit design, vacuum and mechanical engineering, liaising with suppliers, assembly and testing.
• Conducted R&D in SiC DRIE processes and Si wafer dry thinning.
• Designed and developed ICP plasma source for Remote PECVD.
• Upgraded RF and vacuum systems of CCP plasma cleaning tool.
• Completed PhD dissertation on Hot-wire CVD of PTFE films.

Niigata, Japan

• Developed microwave ECR plasma source for hard films etching: concept evaluation, microwave and mechanical engineering, Langmuir plasma diagnostics.
• Designed and conducted experiments in diamond and DLC films etch processes.
• Preformed R&D in CVD of PTFE films for commodity applications.
• Took lead in development of PTFE films CVD industrial tool: concept evaluation, CVD reactor design, vacuum engineering.
• Designed PTFE CVD process charts, characterized film properties, optimized process conditions to get optimum film properties for specific coating application.

Saint-Petersburg, Russia

• Designed atmospheric PECVD experimental setup (RF and mechanical engineering).
• Conducted research in atmospheric PECVD of SiO2 and FeO nanoscale powders.

Saint-Petersburg, Russia

• Assembled and performed reliability tests for 94 GHz microwave power source units.
• Upgraded TCABR Tokamak plasma microwave interferometer (assembly and tuning).
• Developed parts for analog control circuits.

Saint-Petersburg, Russia

• Registered spatial and temporal electron emission fluctuations from nanocarbon films and statistically analyzed them
• Participated in development of orbitron-type vacuum gauge for spacecraft application (made drawings, assembly, calibration)

Doctor Of Philosophy (Phd), Technology Engineering

Thesis: Development of CVD technology for PTFE films fabrication

Master Of Science (Msc), Physical Electronics

Thesis: Statistical analysis of local field emission current fluctuations obtained with nanocarbon cathodes

Bachelor Of Science (Bsc), Physical Electronics

Thesis: Orbitron-type vacuum gauge with nanocarbon field emission cathode