Ashawaraya Shalini Email & Phone Number

Fremont, California, United States

Fremont

• Evaluate, develop and implement the control solutions based on OES, optical CD and thin film metrology
• Perform statistical analysis on optical sensor data for chamber and process optimization
• Provide inputs to product development team from a customer applications perspective
• Support TEL’s control solutions with established accounts
• Provide guidance and training to internal users and customers

Santa Clara

• Led the applications efforts for NextGen product release (VF3+). Coordinated between internal divisions to qualify the system/alpha exit spec and periodically communicated updates to customer (ANT)
• Managed key customers - Global Foundry (5 tools), AMAT, ANT and SAS
• Developed state-of-the-art XPS/XRF solutions for the characterization to prevalent high-k metal gate and other multilayer processes for CMOS devices on both bulk silicon and FDSOI platforms
• Successfully developed XPS/XRF model for 12FDSOI film stacks at GF Fab 8 and transferred production worthy recipes to GF Fab 1, Dresden, Germany
• Established superior performance of X-ray metrology against KT’s optical tool Aleris
• Accelerated market competence of VeraFlexIII with additional LEXRF capability against existing mature XRF tools

San Francisco Bay Area

• Involved in Grandis-UCSC collaboration STT-MRAM research project
• Characterized nanomagnetic elements in time-resolved magnetization measurements using the magneto-optic Kerr effect (TR-MOKE)
• Studied the novel spintronic structures CoFeB/MgO/CoFeB/Ta/Ru stack and identified the materials with minimized switching current
• Evaluated relevant device properties (effective damping, anisotropy and decay constant) using a sequential approach (unstructured films  single nanomagnets  nanomagnet arrays)
• Milled the Grandis sample to replicate FMR measurement conditions and compare our analysis
• Investigated pattern height, width (via SEM), and magnetization (via AFM) of lab modified samples

Exeter, United Kingdom

• (a) Design and Acquisition of time-resolved pump-probe Setup:
• Conceived the project idea to pursue non-linear optical measurement and high frequency characterization simultaneously that allows to determine crystal structure and COP spectrum during the electrical pulse
• Optically investigated non-thermal transition in phase change material (GST-225)
• Studied an epitaxial GST film to explore the character of the modes (6.7 THz and 3.4 THz) within phonon spectrum; it was proved that a phase transition takes place by displacing a single electron without thermally.
• Switched samples between amorphous and crystalline states exposing it to a series of amplified laser pulses (2000 pulses, 85fs duration) and examined temperature profile on the stack
• Designed and developed single wavelength time-resolved ultrafast measurements to analyze the polarization-dependent behavior of the photo-excited carriers of various samples

Chennai Area, India

• Was accountable for developing and implementing defect detection recipes in Memory/Logic device segments
• Achieved high defect capture rate by introducing a reference PCM methodology for 45 nm nodes and offered mature solution for product wafers. Established a correlation between previous and current layer for yield.
• Accomplished Viper2430 dominance in 3-way H2H (against Leica and Metapulse) for DRAM 32nm layers (Micron fab, Boise)
• Identified many of the tools and process-induced-defects which helped customer to correct the source that would have serious financial consequences specially in BEOL
• Characterized and executed additional features - PLCL, Lot repeater and Rule base binning for NextGen product - Viper2435 at Winbond, Taiwan.
• Applied optical wafer inspection capability post CMP process, EBR, and PR development

Doctor Of Philosophy (Phd), Optics And Semiconductors

Techniques: Non-linear optical pump probe spectroscopy, Device fabrication, Optical Parametric Amplifier, Regenerative Amplifier.

M.Tech, Material Science

Completed the final year project in RWTH Aachen, Germany as part of DAAD Exchange program. Project - Study of electronic switching in.