Brian Burrows Email & Phone Number

Granite Bay, Ca, Us

Sunnyvale, California, United States

CTO Advanced Technology Group

Sunnyvale, California, United States

Epi Core Technology• Developed 3:5 Epi chamber for GaN on Si applications. • Developed multi zone linear lamp head on RP Epi Chamber for improved uniformity and profile tuning. • Developed multi wafer H2 bake chamber using RP Epi platform. 6X increase in throughput over previous design.

CTO Advanced Technology Group• Engineering Manager of 12 member multidisciplinary design team.• Developed High Speed Epi Processes (large batch epi processing / porous silicon etch)- successful completion of Arpa-E / DOE programs.

MOCVD Group: Senior Member of the Technical Staff January 2012 – January 2013• Developed 2D and 3D thermal models of a lamp heated MOCVD process chamber using COMSOL and SC Solutions to understand reactor behavior. • Using the results from the thermal model, redesigned the process kit to improve WIW and WTW static and dynamic thermal uniformity.• Designed custom instrumentation to thermally characterize the reactor, calibrate pyrometry, and optimize lamp zone power offsets.• Developed a low cost exhaust heating system that can be used inside the process module under vacuum.Epitaxial Lift Off Group: Senior Member of the Technical Staff August 2009 – December 2011• Sole design engineer responsible for developing 2 generations of high temperature / high concentration hydrofluoric acid wet benches and process kits for an epitaxial lift off process. • Designed a process module for the first pilot line production tool with a significant part count reduction and a 150X increase in output relative to previous generation of hardware. • Designs included injection molded plastic parts, metal components coated with high performance polymers, fluid delivery systems, and custom multi-zone heater jackets.

AEP Chamber Engineering• Lead design effort for a MOCVD reactor. Designed and supervised the design of the Process Kit, Chamber Heating Module and Showerhead. Design team included 20+ members including Electrical and Mechanical Engineers, CFD Engineers, and overseas support.• Mechanical Engineering Manager directly responsible for a team of 4 engineers responsible for the design and improvement of the MOCVD reactor.• Designed novel quartz showerhead for a HVPE deposition process (2 patents pending). • Worked closely with Process Engineers and Business Management to define, design and develop a new product offering for Applied Materials.

CVD/Epi Chamber Engineering• Lead design effort for a reduced cost 300mm Reduced Pressure CVD/Epi Chamber. Designed several major system modules and supervised design of all subsystems. Chamber features included single roll-up chamber module, 25% reduced material cost, pattern insensitive / multizone temperature control. Entire tool modeled using Unigraphics. (2 Patents Pending)• Lead design effort for the first 4 Chamber Epi 300mm System. Greatly reduced COO which allowed win of Micron Epi 300mm RP business. • Redesigned 2 and 4 Chamber Epi for ACP Block I Transfer Chamber (represented first ACP tool shipment). Supported first Intel installation of 2 Chamber Epi 300mm RP ACP tool – Resulted in win of block 1299 Intel business.

Wet Clean Development• Responsible for fluid systems development to support wet chemistry delivery to the Tempest Chamber on the Oasis Platform (300mm Wafer Wet Clean Tool)• Fluid Systems Engineer for significant redesign effort representing the Wet Clean Group’s first revenue-generating tool. Design changes included dilute HCl chemical delivery, liquid flow rate monitoring, single pass DI water quartz heaters, main chamber exhaust routed through the floor and alkaline/acid switching exhaust.• Responsible for designing and qualifying polyethylene rotomolded components used for the main chamber enclosure and internal structures (1 Patent)

ATM Epi 300mm Redesign Program• Completely redesigned the ATM Epi 300mm Beta System to consist of modular components • Lead Module Engineer for several major system modules. • Created conceptual designs at the system level during the initial phases of the project.• Designed modules capable of being completely assembled and tested outside of AMAT Manufacturing. • Provided technical guidance to Engineers and supervised NCG's during redesign program.• ATM Epi 300mm Redesign Successes:90% Market Share, greatly improved serviceability, reduced footprint, material cost reduction greater than 20%, reduced period cost.

General Electric Nuclear Energy, San Jose, CA Reactor Inspection and Repair Services: Mechanical Engineer Jan 94 - July 97• Designed and optimized a 3-Axis electro-mechanical actuator and delivery system used to machine and ultrasonically examine nuclear reactor internal components. Tooling used in project generating $2,000,000 in sales for GE. (2 Patents)• Designed, fabricated, and tested durable, high precision measurement tools, calibration gauges, and alignment fixtures.• Design Engineer overseeing all technical aspects of the tooling development process in addition to providing guidance and technical direction to engineers, draftsmen, and technicians.• Responsible for proper operation and implementation of tooling used during various international inspection and repair projects.