Chih-Hsin Liu Email and Phone Number

N5 EUV lithography overlay metrology- Created overlay correction models in EUV exposure recipes for etching effect compensation to maximize the die yield; the project was the company’s highest priority- Developed a EUV exposure optimization system by overlay error analysis of a lot-based database to reduce the overlay out-of-control (OOC) rate from 23% to 4%- Implemented a defense system to prevent bad semiconductor chips from escaping the EUV lithography stage; the defense system… Show more N5 EUV lithography overlay metrology- Created overlay correction models in EUV exposure recipes for etching effect compensation to maximize the die yield; the project was the company’s highest priority- Developed a EUV exposure optimization system by overlay error analysis of a lot-based database to reduce the overlay out-of-control (OOC) rate from 23% to 4%- Implemented a defense system to prevent bad semiconductor chips from escaping the EUV lithography stage; the defense system is used in fabs that produce millions of 12-inch wafers per year Show less

Teaching Assistant in Solid Mechanics and Nanomaterials Laboratory- Instructed students in solid mechanics and materials concepts and setup the experiments.