Christopher Kaplan Email and Phone Number

Conduct feasibility studies for advanced DUV and EUV computational lithography products.• Study source mask optimization for process window enhancement.• Develop features to enhance and control process windows.• Model and mitigate stochastic failure on wafer.

•Simulated multi layer transmission, reflection and absorption arbitrary dielectric film stack (MATLAB)•Simulated thermal dynamics under EUV illumination including radiative cooling and diffusion (MATLAB)•Simulated membrane vibrations (MATLAB)•Trained and deployed machine learning model to classify defects from SEM images, resulting in high capture rate, and 100x speed up in defect classification (MATLAB)

PhD in physical chemistry, studying ultrafast optical properties of semiconductors.Thesis: https://escholarship.org/uc/item/3xh309qx• Developed experimental apparatus for measurement of time-resolved EUV reflectivity.•Simulated carrier-phonon scattering processes using Matlab with Monte Carlo algorithm to extract physical time constants from experimental data.•Developed method to measure ground and excited state complex valued EUV refractive index.

Grade: Summa cum laudeUndergraduate researcher working in electrocatalysis, specializing in alternative energy. •Investigated structure-function relationship in molecular water oxidation catalysts and related compounds with applications in solar energy conversion. •Designed, fabricated, and investigated mesoporous transparent conductive electrodes for high efficiency water oxidation. •Published results demonstrating clear structure function relationship in a family of electrocatalysts.