Chen 辰 S. Email & Phone Number

Pudong, Shanghai, China

Develop metal thin film atomic layer deposition (ALD TiN/TiAl/TaN) and physical vapor deposition (PVD Ta/Cu) equipment for semiconductor manufacturing

Shanghai City, China

Support local customers in Shanghai for MDP (PVD, Metal CVD, and ALD) tools startup and troubleshooting. Occasionally travel to support nationwide customer.• Provides highly visible customer support through the performance of on-site installation, as well as overseeing any necessary diagnoses, troubleshooting, service, and repair of complex semiconductor manufacturing equipment and systems. • When necessary, works closely with customer to optimize tool performance to meet… Show more Support local customers in Shanghai for MDP (PVD, Metal CVD, and ALD) tools startup and troubleshooting. Occasionally travel to support nationwide customer.• Provides highly visible customer support through the performance of on-site installation, as well as overseeing any necessary diagnoses, troubleshooting, service, and repair of complex semiconductor manufacturing equipment and systems. • When necessary, works closely with customer to optimize tool performance to meet customer production process and integration requirements. • Checks and approves operational quality of system equipment. Instructs customers in the operation and maintenance of the system.• Develop new or modified processes, and work closely with the hardware engineering team to define chamber requirements and characterize hardware designs that meet customer requirements. Show less

Nanjing, Jiangsu, China

Support TSMC Fab16 Ramp

Saskatoon,Sk

Thesis: Fabrication and thermal analysis of polyimide-based x-ray masks at the synchrotron laboratory for micro and nano devices, Canadian Light Source (Accessible at https://ecommons.usask.ca/handle/10388/7474)• Developed a new X-ray lithography mask based on polymer material (polyimide @ 30um)• Study of the thermal effects of the mask under synchrotron radiation• Experienced in clean room technology and photolithography• Micro-fabrication techniques and metrology•… Show more Thesis: Fabrication and thermal analysis of polyimide-based x-ray masks at the synchrotron laboratory for micro and nano devices, Canadian Light Source (Accessible at https://ecommons.usask.ca/handle/10388/7474)• Developed a new X-ray lithography mask based on polymer material (polyimide @ 30um)• Study of the thermal effects of the mask under synchrotron radiation• Experienced in clean room technology and photolithography• Micro-fabrication techniques and metrology• Wet-etching, electroplating, and thin film processing technology• Thermal measurement in vacuum envrionment Show less

Saskatoon, Sk

Teaching Assistant for various undergraduate classes in electrical engineering:• Marking assignments and quizzes• Lab instruction• Managing academic records for students

Master Of Science (M.Sc.), Electrical And Electronics Engineering, Gpa: 4.0/4.0

Activities and Societies: IEEE North Saskatchewan Chapter Research in SyLMAND lab, Canadian Light Source on deep X-ray lithography mask.

Bachelor’S Degree, Mechanical Engneering