Dan Bouchard Email & Phone Number

Lowell, Ma

Diffusion, EPI, Implant, PECVD, ALD

Billerica, Ma

Billerica, Ma

Gas Cluster Ion Beam Technology

Marlboro, Ma

Devens, Ma

Key member of team that successfully ramped prototype string ribbon wafer technology from 20 system pilot to 350 system high volume wafer fab while achieving world class metrics with output exceeding 2 million wafers / week.Traveled to Wuhan, China as Member of team responsible for process training, transfer and start up of 1st Evergreen factory outside the US. Successfully achieved start up and first growth on schedule.

2004 - 2008 Process/Equipment Engineer AMAT 5500 CVD, PVD Ti/Tin Dep, SPT Cobalt Salicide Team leader for Contact loop defect reduction team. Sourced 26 integrated defect types which resulted in > 50% reduction of sustaining false alarms and Best in Class virtual factory defect levels. Recognized as contact loop defectivity expert. 1998 - 2004 Process/Equipment Engineer AMAT 5200 RTA, Source / Drain, Gate, & Silicide Anneal.

Held several key engineering positions across three fabs and technologies, responsible for all aspects of repair, maintenance, and quality of medium / high current and high energy implanters.Systems experience includes Varian DF4, 350D, 80-10, 120-10, Eaton Nv10-80, Nv10-160, Nv20, AMAT XR80, Genus 1500 Megavolt, Thermaprobe TP200, 300, & 400.