Sr. Applications Development Engineer / Manager
Senior Applications Development Engineer / Manager (2009 to 2013)• Managed the Characterization Applications Group which led to the successful completion of the alpha and beta phases of the SP3 unpatterned wafer defect inspection tool.• Improved the sensitivity of the SP3 tool on resist layers by developing a new fluorescence filter. A 20% sensitivity improvement was demonstrated on DUV resist layers.• Received an invention award for submitting a patent which described a way to eliminate the need for film curves by measuring n, k, and thickness of a film in real time during defect inspection.• Increased the Surfscan tool adoption and utilization at Micron by teaching our best known methods at a customer training workshop.Applications Development Engineer / Manager (2006 to 2009)• Managed the Field Applications Group which led to Intel selecting the SP2 vs. a major competitor’s tool, in a four month long head to head. Close to 30 tool orders were placed as a result. Received an award, promotion, and bonus for the effort.• Developed a method to use a 30um search radius to calculate capture rates with meaningful results. The method was adopted by Intel.• Increased tool utilization at major customer sites by developing a method to create fluorescence maps which showed where resist residue remained on patterned wafers. A paper was presented and published on the topic.Senior Applications Development Engineer (2004 to 2006)• Successfully completed the first IC customer SP2 beta testing at Micron, resulting in the Field Product Acceptance (FPA) of the tool.• Created a procedure to conduct and test for matching between multiple tools within a fab, and between fabs. The result was a new product called “InMatch”, which was purchased by several customers.• Traveled to customer sites to aid customers in realizing full entitlement of their Surfscan defect inspection tools.• Performed customer demos on the SP1 resulting in over 10 order placements.
