Dmitry Puzanov Email & Phone Number

Reutlingen, Baden-Württemberg, Germany

Moscow, Russia

Worked with the variety of technological equipment designed for needs of semiconductor industry and research institutes. Was officially trained at manufacturer's sites: Sentech (Berlin, Germany), Filmetrics (Munich, Germany), Diener (Ebhausen, Germany) Angstrom Engineering (Kitchener, ON, Canada), NanoMaster (Austin, TX, USA). Performed 50+ installations and service visits.

Москва, Россия

Assembled and commissioned 2 new beamlines at Kurchatov Centre of Synchrotron Radiation , RSA and BIOSAX. Serviced and upgraded existing beamlines & end stations of the facility, in close collaboration with scientists and administration. Worked with the following spectre of the equipment: x-ray double crystal and plane grating monochromators, X-ray collimating and focusing mirrors, precision in-vacuum mechanics, safety control systems, turbomolecular and ion pumps, pneumatic and cooling water supply systems, helium leak detector etc.

Zelenograd, Moscow, Russia

Commissioned & serviced metrology line for 90 nm semiconductor fab Angstrem-T (defect inspection, CD inspection, electron microscopy). Worked with the equipment by KLA, FEI, Rigaku, Rudolph etc.

Zelenograd, Moscow, Russia

Worked on various R&D/Service atomic force microscopy (AFM) tasks. Participated on every stage of projecting, installing, commissioning and servicing three state-of-the-art beamlines/end stations for Kurchatov Centre of Synchrotron Radiation (PHASE, NANOPES and RKFM) by FMB Berlin/Oxford, SPECS, Huber.Participated in the project of building a custom multi beam electron lithography tool.Participated in developing a custom PVD tool with RF ICP source.