Working on the design of drivers for very high power, petawatt-class lasersVolunteer instructor: Electromagnetism, Circuit Analysis for undergraduates, Plasma Physics and Applications for graduate students

Member, ex-Vicepresident and ex-President of the Industrial Advisory Board for the Electrical and Computer Engineering Department at Colorado State University

Responsible for the design and development of table-top soft X-ray lasers based on gigawatt-class solid state pulsed power drivers.

Led multi-functional, cross-departmental teams and personnel distributed across the globe in the development of unique RF power delivery solutions for semiconductor processing.

I created the NTI group to deal with subjects and concepts in early stage of development, with broad potential applicability. We investigated new opportunities for RF technology development, scoping the feasibility and applicability of new ideas, overcoming basic technological hurdles, and developing modules that can be later used in product development.

In charge for the engineering development programs of high power 162, 60, 27 and 2 MHz generators. Responsible for the development from inception and generation of customer specification to production release.

Manager of the Plasma Sources Group• Led the engineering development program for LB1500/3000, a state-of-the-art inductive plasma source for low pressure applications with very high power density and the best reliability available in the market.• Led the engineering development program for a water vapor delivery system for plasma abatement applications• Investigated a number of applications, including processes related to ALD, native oxide removal and others.

Head, Applications Development and Research for the Plasma Sources Group.• Development of etch endpoint algorithms • Modeling of sheath impedance for RF plasmas• Modeling of heat transfer and wafer heating• Development of Matlab-based software for spectral analysis and production data mining• Spectroscopy of high power pulsed magnetron plasmas• High-speed imaging of arcs in magnetron discharges• FTIR study of plasma dissociation of NF3, SF6, and PFCs• Measurement of atomic density in plasmas via optical spectroscopy• Design and construction of plasma reactors, including inductive and helicon discharges• Development of control loops for plasma stabilization in high-power ICPs• Characterization of the operating range of ICP and toroidal plasma sources for a variety of gas chemistries, including fluorinated gases, O2, N2, H2, NH3, and others• Study of chamber material compatibility for high density ICP and toroidal plasma chambers• Development of custom plasma recipes for abatement, etch and other processes

• Research: Principal Investigator for government grants awarded for the development of fiber optic sensors, application of optical sensing techniques to non-destructive diagnosis in Engineering. Co-PI for international grants awarded for the development of non-destructive evaluation tools in ecology and application of neural networks to modeling of ecological ecosystems.• Teaching: Experimental Techniques: undergraduate level course; Optical properties of materials: graduate level course,• Supervision: Undergraduate and graduate students, both as adviser and as member of supervision committees.

• Research: Principal Investigator for government grants awarded for the development of fiber optic sensors, application of optical sensing techniques to non-destructive diagnosis in Engineering. Co-PI for international grants awarded for the development of non-destructive evaluation tools in ecology and application of neural networks to modeling of ecological ecosystems.• Teaching: Electromagnetism and Optics

Development and diagnosis of new pulsed-metal vapor sources, development and characterization of new and existing soft x-ray lasers.