Gregory Nowling Email & Phone Number

Carlsbad, California, United States

Process Characterization and Development

Greater San Diego Area

San Francisco Bay Area

Process development and customer program management.

San Jose

Wet etch, ALD process development and customer program management.

San Jose, California

Wet etch and ALD/PEALD process development.

Responsible for writer upkeep and process refinement in Agilent’s oligonucleotide DNA microarray fab. Specific duties include troubleshooting printing and wafer processing issues, determining cause for arrays that fail quality control, qualifying new tools for production, cataloging print-head performance, writing ISO compliant operational procedures and certifying fab personnel in these procedures.

Responsible for developing dry-etch and wet-clean processes used in 65, 45, and 32 nm flash memory device manufacturing. Processes include Cu dual-damascene dielectric etches, metal etches, metal oxidations, MOL and BEOL post-etch wet cleans, single & multilayer photoresist strips, wafer backside cleans, and post salicide-RTA strips.Process responsibilities beyond development include coordination of tool maintenance, process and tool qualification specification writing, tool selection, compliance with statistical process control, and process transfer to Spansion’s manufacturing facilities.

Completed five ten-week engineering programs in Spansion’s etch, thin-films, implant-diffusion, lithography, and defect-analysis modules.

During this summer internship, programmed several logic models that were based on piping and instrumentation diagrams of a hydroelectric plant. These models were then assembled into a large simulation program used to train new control-room operators.

Ph.D., Chemical Engineering

Activities and Societies: AIChE AVS MRSDissertation Title: High-Pressure Plasma Deposition of Silicon Nitride and Silicon Dioxide Advisor.

Bs, Chemical Engineering

Undergraduate Senior Projects: - Gasless Combustion of Dense Nickel-Titanium Composites - Microwave Catalytic Oxidation of Carbon Monoxide