Imene Guellil 💎, Ph.D Email & Phone Number

CIFRE-Ph.D on " Nano-functionnalization with High Resolution Focused Ion Beam (HR-FIB/SEM) of Silicon"- Scientific goals : Mainly based on the creation of Single photon emitters in Diamond through the process of Ion implantation of SiV and GeV color centers into Diamond Anvils957 using E*B-FIB Nanopatterning with very low doses at low energies 15 keV & 30 keV, for photonic applications. In the same context, the creation of W centers into UtraThin-28-SOI using the istopoe 28Si ions accelerated at 20keV and 30keV. The third application of FIB instrument is the fabrication of self organized Ge Quantum Dots (QDs) with the combination of FIB Lithography with Ge nanopatterning process into SGOI substrates, followed by Ge condensation in Rapid Thermal Annealing (RTA/RTP).- Instrumental Goals of the thesis : testing the limitative applications of the prototype Dual-Beam HR- FIB/SEM (Nanospace) which works under UHV in order to connect it to the MBE for successive growth steps after FIB nanopatterning.