◎ Thin-film PZT Micro-actuators with On-Chip Sensors - Designed and fabricated high performance (>400μm out-of-plane displacement at <20VDC, bandwidth >100Hz, in footprint 5mm in diameter) thin-film PZT scanning micro-actuators for endoscopic imaging applications - Revised fabrication steps to increase yield and robustness; Fabrication includes high aspect ratio trenches, top and bottom side processing, 13 masks - Developed analytic models to predict motions which can… Show more ◎ Thin-film PZT Micro-actuators with On-Chip Sensors - Designed and fabricated high performance (>400μm out-of-plane displacement at <20VDC, bandwidth >100Hz, in footprint 5mm in diameter) thin-film PZT scanning micro-actuators for endoscopic imaging applications - Revised fabrication steps to increase yield and robustness; Fabrication includes high aspect ratio trenches, top and bottom side processing, 13 masks - Developed analytic models to predict motions which can be applied to other MEMS devices subject to fabrication uncertainties; FEA modeling for components with complex geometry - Developing embedded piezoelectric and piezoresistive sensors - Collaborating to build novel miniature imaging instruments and image human and animal tissues◎ Piezoelectric Micro-robotics - Devised fabrication process flow for millimeter- to centimeter-scale terrestrial micro-robots to incorporate thin-film PZT and polymer materials into the robot structure - Developed test setup and characterized the robot performance Show less

- Graduate Student Instructor for ME240 (Introduction to Dynamics and Vibrations)- Gave three complete lectures on work and energy in rigid body dynamics to 100 students- Developed two computer assignments and solutions to weekly homework with instructors