Jorge Luque Email & Phone Number

Fremont, CA, US

Extended role managing Process Sensors and Algorithm Application for etching systems.

Fremont, CA, US

• Managed the Optical sensors and Endpoint applications group. The yearly volume of sensors shipped is in the several thousands of units. This group has been successful and had steady growth increasing shipments by a.
• Lead a group of engineers working on all aspects of the product development and product support for all hardware and software system components. The team has been stable over the years and created a stream of.
• Managed the product lifecycle of multiple sensor products from C&F to obsolescence. All phases from prototyping, early release, mass deployment, and covering for periods of up to ten years.
• Lead the resolution of a myriad of business issues, escalations and application problems related to the optical/electrical sensors and their applications at customer manufacturing sites.
• Interfaced with Supply Chain to optimize cost/performance with vendors. Resolved multiple quality and obsolescence issues.
• Managed Last Time Buy proposals for a value of up to $3million.

Fremont, CA, US

• Technical lead of the Optical sensors and endpoint program including the selection and integration of new hardware and design of new optical emission and interferometric endpoint algorithms.
• Product support manager for all the optical sensors in the etch tools. Solved multiple high profile escalations involving critical applications at customer sites. Coordinated actions with the local teams and the.

Fremont, CA, US

• Technical lead in the Advanced Process Control (APC) program for implementation of feed-forward and feedback process control in etchers using in-line optical metrology (2 patents).
• Designed and implemented tests to evaluate optical CD integrated metrology units from different vendors.
• Managed the metrology vendor activities to obtain a successful product integrated of the etch system.
• Technical lead for critical APC process startups at top semiconductor factories.
• Managed beta sites and process roadmaps related to APC, integrated metrology and endpoint technologies.

Fremont, CA, US

• Developed conductor etching processes (gate, spacer, STI, trim, hard mask opening) for next generation devices using state-of-the-art etcher systems.
• Developed selected dielectric etch applications in conductor etch tools opening new markets by showing the capability of running mixed processes in the same plasma etcher reactor. The process demos led to customer.
• Created, designed and implemented a new software product (WaferViewer) to interface, analyze and display metrology data from ellipsometers, scatterometers, CD-SEM and particle measurement tools (3 patents). The.
• Performed advanced optical diagnostics by ultraviolet absorption spectroscopy in dielectric plasma etchers.

• Participated in the development of a new plasma reactor for processing of silicon wafers (wafer thinning and damage removal applications).
• Directed the process development to evaluate alternative etching chemistries.
• Conducted optical emission analysis of the plasma and FTIR analysis of the etching byproducts.
• Created software for statistical and graphical wafer analysis, process integration and process control.

Menlo Park, CA, US

• Conducted research on plasma laser diagnostics and managed lab daily activities.
• Developed new optically based techniques to detect trace chemical compounds and measure temperatures in plasma reactors.
• Implement techniques to visualize flows in plasma CVD reactors.
• Investigated new methods of diamond growth by CVD synthesis.
• Author of the spectral simulation program LIFBASE, used by more than two thousand researchers worldwide.

Menlo Park, CA, US

• Conducting research on combustion and environmental monitoring optical sensors.
• Developed laser-based techniques to measure trace species in parts per billion concentrations.
• Developed optical techniques to measure high temperatures with 3% error in harsh environments.

Phd, Chemical Physics

B.S., Chemical Physics