Kenneth Goldberg Email and Phone Number
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Specialties: Optical Physics, Synchrotron Instrumentation, Beamline Optical systems, Extreme Ultraviolet (EUV) Lithography, Wavefront Sensing, Coherence, Interferometry, Adaptive X-Ray Optics (AXO), Wavefront Sensing, Microscopy, Diffractive Optics, Optical Modeling, EUVL Masks, Mask Imaging, IDL.I am proud to lead the Photon Science Development Group lead at the Advanced Light Source (ALS), at Lawrence Berkeley National Laboratory (LBNL). My group develops experimental systems for science, including x-ray optics and beamlines, gratings, detectors, control systems, and advanced computing. We also develop endstations and sample environments.Previously, I led the diagnostics Working Group for the Advanced Light Source Upgrade (ALS-U) through the preliminary and final design phases. This is a US Department of Energy project to revitalize the Advanced Light Source, and transform it into a state of the art, diffraction-limited soft x-ray light source. I led the Beamlines and Optical Systems group within the ALS-U project through the conceptual design phase (CD-0 to CD-1).I was the Deputy Director of LBNL's Center for X-Ray Optics from 2009 through 2015. Until 2016, my work centered around the development and demonstration of technologies for extreme ultraviolet lithography, the dominant chip-making technology now in use. I developed and ran tools for optics testing, photoresist development, and photomask imaging. I served four years as chair of the SPIE Advanced Lithography's EUV Lithography conference (2016-2019), the world's largest annual conference on EUV Lithography technologies. I was the program committee chair for Experimental Systems at the 6th Diffraction-Limited Storage Ring Workshop, held at Lawrence Berkeley National Laboratory, October 29-31, 2018.
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Photon Science Development LeadAdvanced Light Source, Lawrence Berkeley National Laboratory Jul 2022 - PresentBerkeley, California, United States
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Advanced Light Source Upgrade (Als-U), Beamlines And Optical Systems GroupBerkeley Lab Apr 2016 - PresentBerkeley, California, UsaI develop x-ray optics techniques and instrumentation for the Advanced Light Source (ALS), and its upgrade to become a diffraction-limited storage ring (ALS-U) -
Scientific And Technical Adviser For The Sharp Euv Mask MicroscopeLawrence Berkeley National Laboratory Apr 2016 - PresentLawrence Berkeley National Laboratory, Berkeley, California -
PhysicistLawrence Berkeley National Laboratory Dec 1997 - PresentBerkeley, CaI specialize in the development of technologies for EUV and soft X-ray wavelengths, including lithography, interferometry, imaging, beamlines, and experimental systems. I served as the principal investigator for the SEMATECH Berkeley Actinic Mask Inspection tool (called the AIT), and the SHARP EUV Mask Imaging Microscope. I have been a 'beamline scientist' the Advanced Light Source's Beamlines 12.0.1 and 11.3.2 where I was responsible for research operations, scheduling, budget, safety, and scientific output. -
Advanced Light Source Upgrade, Beamlines And Optical Systems LeadBerkeley Lab Jan 2017 - May 2019Berkeley, California, UsaI led the team developing plans for the beamlines and experimental systems from the Conceptual Design phase into the Preliminary Design phase. -
PhysicistKanayama Consulting Jan 2008 - PresentI started Kanayama Consulting to develop software for image data analysis, and consult on issues in the field of optical testing. KanayamaConsulting.com
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Conference Chair And Co-ChairSpie Advanced Lithography—Extreme Ultraviolet Lithography Mar 2015 - Mar 2019San Jose, California, UsaI served as Conference Chair for four years, organizing the program committee to set the scope, review abstracts, create the program, and run the meeting. This has been an especially exciting period as the technology moved into commercialization for the first time.
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Program Committee Chair For Experimental Systems6Th Diffraction Limited Storage Ring Workshop (Dlsr) Jan 2018 - Nov 2018Berkeley, California, Usa
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Head Of Optics Development For Als-U (Als Upgrade)Advanced Light Source Apr 2016 - Dec 2016Lawrence Berkeley National Laboratory -
Principal Investigator, Sharp Euv MicroscopeLawrence Berkeley National Laboratory Jan 2011 - Apr 2016Lawrence Berkeley National Laboratory, Berkeley, CaliforniaThe SHARP microscope (SHARP High-NA Actinic Reticle review Project), now under construction, will become the most advanced EUV microscope dedicated to EUV lithography photomask research. Featuring customizable coherence control, and variable resolutions, SHARP will give lithographers in the semiconductor industry a window into chip-making processes generations ahead of other tools. SHARP will replace the AIT microscope now operating at LBNL's Advanced Light Source. -
Principal Investigator, Actinic Inspection Tool (Ait)Lawrence Berkeley National Laboratory Jan 2007 - Oct 2012Berkeley, CaThe AIT is a SEMATECH-funded worldwide unique EUV microscope dedicated to EUV lithography photomask research. It operates with EUV light on a synchrotron bending-magnet beamline at LBNL's Advanced Light Source. The AIT is used to measure mask and pattern properties, native and programmed defects, and to calibrate non-actinic (i.e. non-EUV-wavelength) mask measurement techniques. -
Deputy DirectorCenter For X-Ray Optics, Lawrence Berkeley National Laboratory Apr 2010 - Apr 2016The Center for X-Ray Optics is a unique research group within the Materials Sciences Division of Lawrence Berkeley National Laboratory. Our focus is on the development of world-leading experimental systems for short-wavelength, extreme ultraviolet and x-ray nano-science.
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Member And 2009 ChairmanAdvanced Light Source Users Executive Committee 2007 - 2010Berkeley, CaRepresenting the 2000+ members of the ALS User Community to the Department of Energy and the ALS Management.
Kenneth Goldberg Skills
Kenneth Goldberg Education Details
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Physics And Applied Mathematics
Frequently Asked Questions about Kenneth Goldberg
What company does Kenneth Goldberg work for?
Kenneth Goldberg works for Berkeley Lab
What is Kenneth Goldberg's role at the current company?
Kenneth Goldberg's current role is Physicist developing technologies and instrumentation for state of the art x-ray optical systems.
What is Kenneth Goldberg's email address?
Kenneth Goldberg's email address is ka****@****box.com
What schools did Kenneth Goldberg attend?
Kenneth Goldberg attended University Of California, Berkeley, University Of California, Berkeley.
What are some of Kenneth Goldberg's interests?
Kenneth Goldberg has interest in Optics, Software Development, Jazz, Photography, Light.
What skills is Kenneth Goldberg known for?
Kenneth Goldberg has skills like Optics, Physics, Photolithography, Microscopy, Lithography, Nanotechnology, Characterization, Interferometry, Thin Films, Materials Science, Experimentation, Spectroscopy.
Who are Kenneth Goldberg's colleagues?
Kenneth Goldberg's colleagues are Lisa Hunt, Robert Clear, Tito Ding Bautista, Shraddha Ravani, Swikritee Wagle, Johannes Mahl, Joshua Maloney.
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Kenneth Goldberg
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Kenneth Goldberg
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