Researched and developed advanced plasma etch processes for multiple conductor etch logic applications• Used design of experiment (DOE) to develop novel plasma etch solutions for front-end-of-line (FEOL) and back-end-of-line (BEOL) applications in 2nm, 3nm, 5nm, and 7nm logic technology nodes• Defended and penetrated multiple applications worth $80M business annually as the technical lead for BEOL• Communicated with international customers weekly to deliver results and solutions, and discuss technical challenges and roadmaps for high volume manufacturing products• Owned industry-leading dry etch tool that processed multiple projects for 1st tier semiconductor companies

Developed 10nm semiconductor technology using data analysis skills with fabrication process knowledge• Improved yield of 10nm node semiconductor product using data analysis (JMP) and semiconductor fabrication process knowledge• Monitored baseline trends of multiple key processes to investigate root cause of low yield using data analysis (JMP) and FIFA (Fault Isolation and Fault Analysis)• Developed JMP scripting language (JSL) to automate routine data analysis and advanced data acquisition

Fabricated and characterized silicon-based solid-state neutron detectors with high detection efficiency• Fabricated high aspect ratio Si p-n diode microstructures using patterning, deposition, dry/wet etch, and cleaning to capture nuclear reaction products• Optimized conformal boron deposition in microstructures using LPCVD, and developed boron etch process using photolithography and ICP-RIE to maximize thermal neutron capture• Inspected and simulated fabrication process with 4-point probe, NanoSpec, ellipsometry, surface profiler, SEM, TSUPREM-4, and MEDICI• Characterized devices with current-voltage, capacitance-voltage, and neutron pulse-height spectra

• Course: Integrated Circuit Processes & Design• Assisted cleanroom staff to teach graduate students how to fabricate devices including PN diodes, MOSFETs, MOS capacitors, Kelvin structures, and TLM patterns in RPI cleanroom• Graded all the homework and provided 1hr office hour/week

• Course: Optical Communication and Integrated Optics• Ran optics lab twice a week to teach/demonstrate undergraduates how to do optics experiments• Graded all the homework and provided 1hr office hour/week