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I have extensive experience with semiconductor processing, covering the entire gamut of thin film deposition, ranging from tool design and chemical sources synthesis through process development and to materials characterisation. All of which provided interesting technical challenges to solve.My PhD in chemistry was granted by Harvard for the synthesis of new metal precursors and proving their use for the growth of oxide films. I have been engaged in a variety of basic research and manufacturing problems relating to semiconductor and photovoltaic devices. Having often built the deposition tool used for these works, I have a large amount of experience in troubleshooting and maintaining semiconductor tools.
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Senior ScientistEntegris Sep 2024 - PresentBillerica, Ma, UsWorking in Specialty Coatings division -
Senior Process Engineer IiAsm 2018 - Sep 2024Developed and demonstrated new processes for ALD deposition of dielectric films to meet the cutting edge needs of both logic and memory customers. Tested prototype hardware and guided design teams in improving the hardware. Interacted with the software group to improve the control software of the deposition tool. Performed the initial process start-up and hardware troubleshooting of a new four-wafer deposition tool. Assisted in the productization of an area-selective deposition process. Generated IP by submitting multiple inventions for patenting.
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Process EngineerMicron Technology 2014 - 2018Boise, Idaho, UsWorking in the Advanced Packaging Technology Development on 3Di chip stacking. Performed CVD process development work for dielectric barriers in optimizing existing processes and characterize new processes. Improved costs of solder pillar reflow by installing a new demo tool and bringing it to the tool of record status. Managed wet processes for wafer level fan-out packaging. Evaluated new solvent chemistries for photo resist removal. Proficient in the use of JMP, SPC and Klarity. -
ResearcherImec 2010 - 2014Leuven, BeDesigned and constructed UHV compatible Atomic Layer Deposition reactor and performed growth and interfacial studies of thin film high-K materials on III-V materials for device use as well as in-situ surface analysis of III-V surface passivation. Developed a molecular layer deposition (MLD) reactor and process to deposit conformal anti-reflective coatings for lithography purposes. Determined the mechanism of an undesired etching process present in the ALD growth of tantalum oxide. Experience in class 1000 cleanrooms and with the use of SE,GATR-FTIR, STM and STS measurement techniques. -
Research ScientistEpv Solar 2008 - 2010Carried out investigations into novel silicon feedstocks for photovoltaics. Developed a theoretical model of silane based film growth during plasma enhanced chemical vapour deposition (PECVD) with MATLAB. Developed new electronic post treatments to achieve defect remediation in production solar cells. Studied opto-electronic properties of amorphous silicon photovoltaic devices. Prepared PVD coatings of TCOs onto glass by thermal evaporation. Operated a laser scribing tool for isolation of solar cells.
Leonard Rodriguez Skills
Leonard Rodriguez Education Details
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Harvard UniversityPhysical Chemistry -
Harvard UniversityPhysical Chemistry
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Mcgill UniversityChemistry
Frequently Asked Questions about Leonard Rodriguez
What company does Leonard Rodriguez work for?
Leonard Rodriguez works for Entegris
What is Leonard Rodriguez's role at the current company?
Leonard Rodriguez's current role is Senior Scientist at Entegris.
What is Leonard Rodriguez's email address?
Leonard Rodriguez's email address is lr****@****ron.com
What is Leonard Rodriguez's direct phone number?
Leonard Rodriguez's direct phone number is +120836*****
What schools did Leonard Rodriguez attend?
Leonard Rodriguez attended Harvard University, Harvard University, Mcgill University.
What skills is Leonard Rodriguez known for?
Leonard Rodriguez has skills like Ald, Cvd, Thin Films, Process Development, Surface Chemistry, Materials Science, Semiconductors, Semiconductor Process, Photovoltaics, Materials Characterisation.
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