 Project leader of wafer damage/contamination induced by VUV pulses Investigation of photodamage mechanism of optical pulses via time-based linear and nonlinear light-matter interaction Design and conduct experiments for UV/VUV induced damage on dielectric materials Produce failure analysis protocols with different inspection tools (AFM, SEM, EDX, OM, WLI, etc.)  Investigation, generation, optimization, and characterization of high-power VUV laser source for wafer inspection

Design, simulation, and analysis of optical systemsZemax: freeform optics design (e.g., reflective optical system, head-up display systems)Lumerical: wave-optic system design and analysis (e.g., refraction-diffraction system, wearable devices)Research and improvement on 3D volumetric display technology