Thesis Title: Chemical Mechanical Polishing of Silicon Carbide (SiC) Wafers.Supervisor: Dr. Manmohan Shisodiya, Dean of Student Affairs, Gautam Buddha University.Co-Supervisor: Dr. O.P. Thakur, Scientist 'G', SSPL, DRDO.Thesis Research: Investigated methods for the chemical mechanical polishing (CMP) of Silicon Carbide wafers to achieve ultra-smooth surfaces, a critical requirement in high-power and high-frequency electronic applications. Developed and optimized CMP protocols, including slurry formulation and process parameters, to enhance surface quality and reduce defects. Conducted a systematic analysis to evaluate polishing efficiency and surface morphology to refine CMP techniques for SiC.