Research Staff Member, Manager, Engineer
Ibm
For over 18 years at IBM, Min conducted R&D for high-performance CMOS devices. She was the technical leader for 14nm FINFET technology transfer from research to 300mm fab. She led groups of engineers of process, device, patterning, lithography, circuit and testing, etc., and successfully delivered key milestone of functional SRAM. Min co-invented and developed hybrid orientation technology (HOT) using wafer bonding and selective epitaxy, and demonstrated highest performance for CMOS devices and ring-oscillators at the time. She also designed and fabricated extremely-thin silicon-on-oxide (ETSOI) MOSFETs with self-aligned back-gate, and explored III-V InGaAs/SiGe hybrid CMOS. Min pioneered silicon photonics (silicon waveguides/photonic switches and Ge photodetectors) with fully integrated monolithic CMOS technology, and fabricated fully functional 25 Gb/s silicon photonic transceivers at 90nm node. Min designed and fabricated high speed and low power silicon Lateral Trench Photodetector with fully integrated CMOS trans-impedance amplifier (TIA) at 130nm node.She started her career at IBM’s Microelectronic Division, first as a process integration engineer for 90nm vertical Dynamic Random Access Memory (DRAM) and then as an integration manager for 32nm embedded DRAM. She researched and developed novel phase-change memory with greatly reduced reset current and very tight set/reset distribution in fully switching 10x10 arrays.Min received 17 IBM Invention Plateau Awards, and a Research Division Award for FINFET Technology. Min was named as IBM Master Inventor in 2006. Min co-authored 1 book chapter, 27 peer-reviewed journal articles, 43 conference proceedings and 71 U.S. patents. Based on her outstanding technical background, Min had served as a technical assistant to various IBM’s Vice Presidents.