• Surface acoustic waves (SAWs) devices• Acoustic Microfluidic• Microfabrication of Lithium niobate based SAWs devices• Characterization of liquid drops displacement using SAWs Project: GLISSACTIF

Design and technology development of MEMS/MOEMS devices.• Technology development of a vertical microscanner• Low temperature wafers sealing for packaging of MOEMS devices• Fabrication of a new generation of atomic resonators• Device dynamic characterization: laser vibrometer• Managing project and purchase of material • Writting reports and participation in project proposal

• Technology development of MEMS based Stirling engine to harvest energy from low waste heat. • Fabrication of low frequency hybrid fluidic membranes for piston free thermal machines. • Freely suspended high temperature soft polymer (RTV silicone) thin membranes. • Multiple Si/glass anodic sealing.• Wafer level filling of cavities with fluid through microchannels. • Fabrication of a Si pillar based heat regenerator.• Device dynamic characterization : laser vibrometer• Managing project and purchase of material

• Technology development for the Cesium (Cs) atomic resonators.• OTS polymer coating of Cs microcells as well as classical glass cells (glass blowing) in vapor phase. • Fabrication of binary gratings in glass.• Reactive ion etching of glass.• Preliminary optical characterization of gratings : optical microscope, He-Ne laser.

Thesis title: Design, technology and packaging of cesium vapor cells for MEMS atomic clocksTask:• Design and fabrication of different silicon cavities based Cs vapor cells (Transmissive and Reflective).• DRIE process development to improve Si sidewall quality while etching 1.5 mm deep.• Development of wet KOH etching of silicon (improving Si 111 plane near mirror like used as optical reflectors).• Fabrication of micro-optical components (binary diffraction gratings, quarter wave plates) in silicon nitride.• RIE of silicon nitride.• Cs activation inside sealed silicon cavities using external laser.• Preliminary optical characterization of gratings : optical microscope, He-Ne laser.• Thermal simulation of LTCC based MEMS atomic clock package.

• Development of microfluidic chip-capillary electrophoresis integrated with electrodes for chemical and biological analysis. • Fabrication of microchannels over silicon wafer using bulk micromachining. • Fabrication of microchannels over PDMS using SU8 photoresist mold. • Sealing of PDMS chip having microchannels with glass wafer having electrodes.

• Analytical designing of two types of microgyroscope, one is symmetric and the other is elastically gimbaled. • Simulation of microgyroscope using C language. • Layout design using Tanner L-Edit software.