Robert Jan Van Wijk Email & Phone Number

Eindhoven, Nb, Nl

Veldhoven, North Brabant, Netherlands

College Lead Data Science & EngineeringThe Data College is part of ASML's R&D Academy. It provides training on data science and data engineering for the entire company. Together with colleagues from Learning & Knowledge Management it's my responsibily to define the contents of the learning trajectories.

Veldhoven, North Brabant, Netherlands

Groupleader Data ScienceGrowing the Applied Data Science competence in ASML. Repositioning the group in the organization to create a strong platform for Data Science and Data Engineering in ASML.

Veldhoven, The Netherlands

Groupleader Data Science & Control AlgorithmsIn order to reach full on-product performance, the lithographic system needs to be fine-tuned to the specific characteristics of the production process. My group developed statistical methods and mathematical algorithms to analyze metrology data and optimize scanner settings. These tools are made available for customer use in application software products such as Litho InSight. The group also housed the Applied Data Science competence, focusing on advanced statistical methods including machine learning and big data analysis.

Veldhoven, The Netherlands

Heading the SE Focus group.During exposure the silicon wafer needs to be kept close (~30 nm) to best focus of the aerial image. Many components of the optical path and several sensors in the lithographic tool need to cooperate to achieve this precise positioning. Further refinement is achieved from metrology data and application software. The SE Focus group was responsible for the system focus budgets of both NXT (DUV) and NXE (EUV) litho tools, including application software. It also maintained ASML's Focus Roadmap.

Veldhoven, The Netherlands

Joined development with key suppliers of the manufacturing process and final design of the FlexRay programmable illumination module in ASML lithography systems. The FlexRay module consists of a multi-mirror MEMS device (thousands of mirrors with individual 2-axis actuation) and a high-frequency mirror direction sensor. It enables instant customized illumination profiles, replacing static DOE holograms. My team was responsible for the technical (i.e. non-commercial) aspects of the complex supply chain. Close cooperation with suppliers to reach a reliable production process, and handle the initial disruptions.

Veldhoven, The Netherlands

Director D&E Imaging Systems Development (ISD)The department specified, integrated and qualified the optical column (light source, illuminator, lens) in ASML lithography systems. Before a reorganization the department was also the main responsible for immersion and vacuum technology.Groupleader Projection, D&E ISDGroupleader Illumination, D&E ISDGroupleader Leveling Systems, D&E Measurement Systems Development

Arnhem, The Netherlands

Group Head Process AnalysisDevelopment and implementation of robust and automated measurement systems for on-line quality control in manufacturing processes. Section Head Lasers & OpticsHeading the "laser lab". Laser applications in optical spectroscopy and in cutting and welding of materials.Project Lead and Research ScientistDevelopment and implementation of in-process quality control systems using on-line Raman spectroscopy and advanced chemometrics.Analysis of process-structure-property relationships of polymer fibers for industrial and textile applications.Development of liquid-crystalline side-chain polymers for optical data storage and optical modulators

Ph.D., Solid State Physics

Ph.D. thesis "Phonons in submicron geometries". Dynamics of phonons in extremely confined conditions, studied by time-resolved.

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