Robert Schanzer Email & Phone Number

United States

Retired as of September 2019

Virginia, United States

Retired September 2019

* Coordinated projects of Defect Reduction Engineers for improving yields on 80 and 70nm DRAM Technology. * Implemented Statistical Process Control Metrics for Defectivty tracking.* Technology Transfer Liason between Qimonda Dresden (Germany) and Qimonda Richmond. Coordinated the transfer and implementation of 80+ inspection recipes for two different technologies (80 and 70nm) from Germany to Richmond.

Lead Process/Manufacturing Engineer in Furnace Engineering Group. Managed the operation and improved performance of multiple processes for Atmospheric and LPCVD vertical furnaces

Defect Reduction Engineer (1999-2001) responsible for in-line product disposition and yield improvement.•Using inspection facilities and SEM review equipment, found major yield contributor which resulted in 40% yield improvement. •Led equipment Induced Defect Density project involving the defect analysis from all clean room process equipment. •Acted as liaison between yield engineers and process engineers to reduce particle levels for all major capital equipment… Show more Defect Reduction Engineer (1999-2001) responsible for in-line product disposition and yield improvement.•Using inspection facilities and SEM review equipment, found major yield contributor which resulted in 40% yield improvement. •Led equipment Induced Defect Density project involving the defect analysis from all clean room process equipment. •Acted as liaison between yield engineers and process engineers to reduce particle levels for all major capital equipment. Process Engineering (1996-1999) • Instrumental in layout of equipment for new clean room.• Facilitated the purchase, prove-in, and characterization of 44 Vertical Atmospheric and LPCVD 200mm Furnaces. • Coordinated team activities and projects consisting of furnace evaluations, source inspections, equipment characterizations and documentation for equipment operation.• Trained production staff to operate furnace equipment and recognize problems before they become critical. Show less

Facilitated the purchase, prove-in and characterization of Horizontal Atmospheric furnaces and associated measurement equipment. Implemented the substitution of t-DCE (liquid) for HCL (gas) for furnace gettering which resulted in reduced maintenance and downtime. Purchased furnace computer system and worked with IT in setting up Automation resulting in major scrap avoidance. Supervised initial conversion of OR1 Diffusion equipment from 125 mm to 150 mm wafers.Facilitated and… Show more Facilitated the purchase, prove-in and characterization of Horizontal Atmospheric furnaces and associated measurement equipment. Implemented the substitution of t-DCE (liquid) for HCL (gas) for furnace gettering which resulted in reduced maintenance and downtime. Purchased furnace computer system and worked with IT in setting up Automation resulting in major scrap avoidance. Supervised initial conversion of OR1 Diffusion equipment from 125 mm to 150 mm wafers.Facilitated and characterized AT&T’s first two manufacturing atmospheric vertical furnaces. Purchased, installed and characterized new PTI valve to improve Gate Oxide Uniformity.Trained engineering associates and process analysts in the operation of the equipment. Wrote the operation instructions for all the above equipment. Show less

Diffusion Process Engineer MOS II and MOS IV Clean Rooms. Prepared atmospheric furnace equipment for production start-up of new processes. This included Installing ceramic liners, quartz and silicon carbide process tubes, and steam and PBR3 bubblers for 24 diffusion furnaces. Trained production personnel and techs on operation of equipment and trouble shooting.Qualified the use of Silicon Carbide (SiC) as an alternate material for use in high temperature furnace processing. This… Show more Diffusion Process Engineer MOS II and MOS IV Clean Rooms. Prepared atmospheric furnace equipment for production start-up of new processes. This included Installing ceramic liners, quartz and silicon carbide process tubes, and steam and PBR3 bubblers for 24 diffusion furnaces. Trained production personnel and techs on operation of equipment and trouble shooting.Qualified the use of Silicon Carbide (SiC) as an alternate material for use in high temperature furnace processing. This resulted in a cost savings of more than $2M across multiple clean rooms for AT&T Technologies (formerly Western Electric).Designed the Master Furnace Sheet document for displaying all critical processes on one laminated sheet. This document became the standard for all furnace processes for each future clean room in Allentown (MOSI, MOSII, MOSIV, Reading, Kansas City KC1 and KC2 and Madrid). Show less

Msee, Electrical Engineering

Ba, Physics

Activities and Societies: Bowling, singing-Crane School of Music Choir,