Recent developments in lithography lead to the requirement for lightweight positioning systems. These lightweight systems introduce flexible dynamical behavior. The aim of this research is to investigate and achieve the limits of control performance in the presence of flexible dynamical behavior. Hereto, fundamental performance limitations are investigated and a new control design framework is developed that can deal with unmeasured performance variables. The proposed solution has shown to outperform conventional control design techniques on an accurate simulation model of a next-generation wafer stage. These results pave the way for motion control for next-generation positioning systems.

Optimal Control of a Multi-Actuated By-Wire VehicleMost traditional electronic stability control systems operate by braking individual wheels and/or reduce excess engine power if the driver is about to lose control. The focus of this study was to look at wheel steer as an additional actuator to assist the brakes in controlling a full by-wire vehicle. Model predictive control theory has been used to design an electronic stability controller and simulations were performed on a realistic vehicle model (Carsim).