Sari Elomaa (Nee Sirviö) Email & Phone Number

Helsinki Area, Finland

My main responsibility is working with Fabry Perot Process Integration.

My main responsibilities are back-end related work. Wafer dicing, electrical measuremennts by probing IV and CV and wire bonding. ALD deposition. SEM and optical microscopy.

Vantaa

My responsibilities included the process development in areas of wafer dicing, evaporation and diebonding.

I worked as a project manager in two 7th framework EU-project: NANODEVICE and NANOSOLUTIONS. The projects were about health effects of exposure to nanoparticles in working environments.In addition I actively took part in Coordination of European Commission´s NanoSafety Cluster activities.

I worked at Vaisala´s sensor factory and in clean room environment. My tasks related to process support.

My tasks included designing MEMS-component fabrication processes, writing fabrication instructions for the operators and performing process-related measurements. The focus of my work was the implementation of atomic layer deposited (ALD) thin films in different micromechanical components.I also pre-treated and deposited many customer samples myself. More.

My work included PhD studies and clean room processing.I deposited and studied the film properties of atomic layer deposition (ALD)-grown Al2O3, TiO2 and ZnO filmsand their nanolaminates by film thickness measurement and determining their etch rates with several wet etchantsand with ICP dry etching.I manufactured porous silicon and anodic alumina and.

Licentiate Of Science (Technology), Semiconductor Technology, Materials Science

Activities and Societies: I play the violin in the Aalto University´s symphony orchestra. "In Swedish and Finnish universities, a.

M. Sc, Chemistry (Inorganic Chemistry), Physics, Geology