Research Associate
Current• Designed, programmed (Python), and tested in-situ thin-film deposition/coating tool combined with small angle X-ray scattering (GISAXS, GIWAXS) and ellipsometry.• Extensive hands-on experience working in a wet lab and cleanroom related to thin film semiconductor and compound semiconductor materials, thin film deposition, testing, characterization, performance metrics.• Investigated fundamental relationships between low-k dielectric thin films, process parameters (dry plasma etching, metal oxide infiltration with ALD) and morphology. • Analyzed and brainstorm with other group members about how the material properties and processing impact material and device functional performance.• Optimized and developed process parameters and recipes (plasma etch, gas composition) for low-k dielectric films.• Performed process characterization, integration and equipment troubleshooting.