Member of a R&D team that proposes technologies and builds successful N+1 to N+3 imaging and wafer inspection tools made from unique inventions and innovative light sources, architectures, coatings, detectors and methods.With my expertise in nano-photonics, imaging and light propagation in complex materials, my role is focused on modeling and simulation of wafer optical inspectors that detects defects at nanometer scale in patterned semi-conductor devices.Key to the simulation accuracy, I have developed unique methods that solve Maxwell’s equations rigorously and may compute how light enters a wafer stack, how a defect, a nuisance or some wafer noise scatter light that then emerges out of the wafer. Fourier imaging techniques are then implemented to model the inspection that accounts for light source level, specific inspector architectures and stochastic noise level present at sensor.Discovered techniques that speed up simulation by 200x, providing solution to problems that could not have been obtained otherwise.Developed skills in distributed computing to run codes efficiently on supercomputers.Train and support end-users to run simulations across the globe.Simulation tool is used to-design next architecture of broadband flood illumination and laser scanning inspection tools-find best recipes to increase signal from defect and mitigate wafer noise level (surface roughness, LER, process variations, nuisances)-support customer in the fab.-propose defect decoration to enhance signal…

Prof. Xiang Zhang's lab.Nanophotonics, near-field optics.Analytical modeling and numerical implementation.Scattering, absorption, emission, fluorescence, imagingSurface plasmon optics, superlens imaging.Numerical methods: RCWA, FDTD, integral and perturbative methods, T-Matrix.Designer of first Far-field Superlens and first proof of concept in the real world.

Prof. Xiang Zhang's lab.

Management/teaching of laboratory class on laser, holography, Fourier optics, light scattering.

Theoretical modeling of waves propagation in random media.Worked on basic questions such as how to deal with scattering in absorbing host under a radiative transfer framework (the only method that can be applied in the real world).Design of scattering paint. Numerical implementation of modeling tool.

Optical engineering