Tim Brunner Email & Phone Number

Timothy A. Brunner has been working in the area of optical lithography since 1981, with particular interests in advanced image formation, simulation, process control, metrology techniques and interdisciplinary aspects of lithography. He received his B.A. from Carleton College in 1975 and his doctorate from MIT in 1980, both in physics. He has worked at Perkin-Elmer, Xerox PARC and IBM Research. He joined GLOBALFOUNDRIES in 2015, working at Fab10 in Fishkill, NY. Dr. Brunner has published extensively, and holds several dozen issued patents in the area of optical lithography. He served as the executive chair of the 1997 and 1998 SPIE Microlithography Symposia. He was named an SPIE Fellow in 2003 and won the Frits Zernike award in 2006.