Member Of Technical Staff
Fremont, Ca, Us
Key member of technical staff developing state-of-the-art equipment and processes for semiconductor wafer processing. Provided expertise in diverse areas of R&D, engineering and product support for a multi-billion dollar corporation.• Developed methods for process tool fault detection; OES, RF Sensors, Algorithm Development, Multi-variate analysis, Machine Learning, Machine Vision, Instrument control, Matlab, C/C++, Python, SQL and VisualBasic.• Developed sensor based Machine Learning algorithms which resulted in increasing spacer etch throughput by over 20% for major customer. Tree Regression & Classification, SVM, PLS• Characterized etch (RIE) results with SEM, confocal microscopy, spectral optical ellipsometry for thin film measurement, TEM, EDX. Statistical methods for process monitoring and correction: SPC and Chemometrics, Machine Learning, Design of Experiments • Pioneered development of reactors and processes for TSV (3DIC) and MEMS etch (ICP and Microwave). Ensured acceptance of equipment with key customers, established a path to majority market share. Developed high etch rate alternatives to Bosch process, conducted effective demos employing DOE methods.• Patented processes for post ion implant strip with very low silicon recess; photoresist removal with plasma clean. • Introduced new process chambers and processes for: ICP etch of dielectric films and confined plasma metal etch, leading to etch tool acquisition by several key customers.