Yichen "Daniel" Lu Email & Phone Number

San Antonio, Texas, United States

• Process owner of 40 ASM A400 vertical furnaces, including oxidations, nitrogen anneals/drives, forming gas anneals (alloy), POCL doping, and LPCVD depositions in Class 1 cleanrooms.
• Developed new semiconductor manufacturing processes for technology transfer
• Implemented FDC coverage for the diffusion area with Fab Guard reports
• Selected and qualified semiconductor processing tools and monitored fab metrics with statistical process control
• Represented the DIFF/EPI/CVD area for quality assurance and reviewed CPKs from SPC chart monthly
• Worked with integration engineers and fab operators to improve process metrics

Richmond, California, United States

• Developed waveguide optical amplifiers on 150 mm wafers as the company’s next generation core technology
• Designed 9 photomasks with Python for the Nikon i-line stepper and coordinated with the photomask manufacturer
• Process integration for the second half of the waveguide optical amplifier fabrication, including 3 layers of photolithography, 3 layers of sputtering, liftoff, annealing, and low temperature oxide deposition
• Increased the stability of photolithography and decreased the linewidth variation of photoresists with control charts
• Primary ownership of the Pico Track spin-coating and developing system and the Tystar furnace for low temperature oxide deposition in the company
• Secondary ownership of 3 pieces of capital equipment, one Tystar furnace and one Sandvik furnace for Si3N4 deposition and one Ion-tech Ion Beam Sputterer for Al2O3 deposition

San Diego, California, United States

• Started all the fabrication processes in the research group, created SOPs, and trained 3 new PhD students
• Designed photomasks with AutoCAD and Layout Editor, and built 3D visualization with Rhinoceros 5
• Developed graphene-based microelectrode arrays to eliminate crosstalk in multimodal neural interfaces
• Increased the device yield from 50% to 94% by optimizing graphene transfer, etching, and cleaning processes
• Decreased the impedance of graphene neural interface by 100-fold with platinum nanoparticle electrodeposition
• Recorded neural signals in animal models and analyzed them with MATLAB

• Calibrated devices for electrochemistry, laser machining, and electroencephalogram recording
• Purchased chemicals, glassware, and personal protection equipment (PPE) for 40 students
• Trained students in 4 hand-on laboratory sessions, led discussion during office hours, and graded assignments

University Of Pennsylvania, Philadelphia, PA, 19104

Trained new users on Kurt Lesker Pro Line PVD75, spin-coaters, and Karl Suss MA6 Mask Aligner

University Of Pennsylvania, Philadelphia, PA, 19104

• Converted designs and fabricated chromium lithography masks for clients with Heidelberg DWL66+
• Created and calibrated deposition SOPs for Cambridge Nanotech S200 ALD and Kurt Lesker Pro Line PVD75

• Fabricated graphene field-effect transistor (g-FET) biosensors in the clean room
• Developed Lyme disease sensors based on functionalized graphene FETs
• Synthesized graphene with chemical vapor deposition (CVD) method

Phildelphia

• Synthesized porous graphene with laser pyrolysis of polyimide
• Fabricated flexible microelectrode arrays in clean room with photolithography, e-beam evaporation, and wet etching
• Achieved the highest charge injection capacitance at the time of publication

Doctor Of Philosophy (Phd), Electrical Engineering, 4.0

Medical devices and systems

Master Of Science (Ms), Materials Science, 3.90