Prepare and present internal training material for Lithography technology.Organise meeting with equipment supplier and prepare RFQ.Participate technology transfer from Silex Sweden.

Set up ASML immersion scanner /1700 /1900 maintenance and troubleshooting SOP, train assistant engineer to improve their ability of maintenance and troubleshooting, increase equipment up time.In charge of defect reduction project, turn on auto flush function based on wafer count, reduce immersion scanner defect fail rate effectively, increase equipment up time significantly.In charge of capacity improvement project, install PEP and increase throughput significantly.

In charge of ASML scanner /400 /750 /1100 /1150, Cymer laser, KLA Tencor , Applied material and Accent Overlay equipment maintenance and troubleshooting, able to analyze and solve most problems.Participate in reticle box assessing and refurnishing project, reduce reticle particle scan fail rate.In charge of ASML scanner dynamic error reduction project and ensure catching and solving abnormality in time to minimize product impact.