Epiluvac AB - CVD/MOCVD reactors

We provide flexible reactor systems for Wide Band Gap (WBG) semiconductors (SiC/GaN/AlN etc). Epiluvac is a privately held Swedish company founded 2013 by a team of engineers with decades of research and development experience from the CVD reactor field and especially hot-wall CVD SiC epitaxy equipment. The company offers CVD and MOCVD reactors and process chambers for high purity and high temperatures with customized gas mixing systems. Applications include epitaxy and bulk growth of WBG compound semiconductors like silicon carbide (SiC) and gallium nitride (GaN) but also graphene and nanowire manufacturing. Epiluvac provides standard as well as customized reactor solutions and a wide range of service and maintenance packages.