NanoFAB.SDSU

NanoFAB.SDSU, a brand-new leading center for micro and nanofabrication located in the EIS building of SDSU. The state-of-the-art facility has a 2500 sq. ft. ISO 9001-certified Class 1000 Cleanroom with 4” and 6” wafer processing capability with 10 micron lithography feature sizes. The Center provides a comprehensive and expanding selection of state-of-the-art process equipment for lithography, etching, thermal processing, thin-film deposition, and characterization. The vision of the Center is to become a leading national and international center of integrated silicon and polymer/carbon-based micro and nanofabrication facility to support user needs in newer areas of nanoscale science, engineering, and technology domains. The Center has a strong focus on educating undergraduate, masters, and doctoral students in the various areas of nanotechnology.