NML-Nanotechnology and Microsystems Laboratory

The Nanotechnology and Microsystems Laboratory (NML) is a novel National Nano-fabrication / Nano-electronics facility part of the Institute of Nanoscience and Nanotechnology (INN) of the National Center for Scientific Research (NCSR) ‘Demokritos’ in Greece. The lab with a clean-room of 250m2 (ISO 5, ISO 6 certified) is particularly active in the areas of Micro-nanofabrication, Nanoelectronics, Nanophotonics and MOEMS/MEMS and is complemented with satellite facilities for structural and electrical characterization. Our aim is: - To promote Semiconductors processing and manufacturing technologies for Nano-electronics, Nano-systems and photonics. - To support industry with high added value products and production processes. - To support industry in realizing their technology roadmap and participate in European and globally funded Research projects. - To develop human potential by education and training activities in cutting edge technologies. The Nanotechnology and Microsystems Laboratory offers a wide bouquet of services such as: - Production of cutting edge technology prototypes (biosensors, nano- systems, nano-wire transistors, opto-electronics, waveguides, ICs) for fabless companies. - Electrical characterization of semiconductor devices and sensors. - Structural characterization and microscopy. - Research and Development project management. - Process troubleshooting, improvement and new process development.