SPP Technologies Co., Ltd.

SPT (SPP Technologies) provides advanced etching and deposition equipment for the MEMS and compound semiconductor industries. With over 30 years of experience in Si DRIE, PECVD, and other specialized process technologies, we help researchers and manufacturers achieve precise, low-damage, and production-ready results. We specialize in tailored solutions for high-performance applications, including: – Deep reactive ion etching (DRIE) – Plasma-enhanced CVD (PECVD) – Etching systems for SiC, GaN, InP, and other materials Our systems are trusted worldwide for their reliability, process stability, and ability to handle challenging device structures. From R&D labs to mass production lines, SPT supports customers with proven technology and expert collaboration. SPT is headquartered in Japan and operates globally with partners in the US, Europe, and Asia.