UPT CO., LTD.

UPT has been providing Sealing products for semiconductor industries come in various forms, including oring, gaskets, transfer robot pads with difference materials such as FFKM, FKM, FSI and engineering plastics. These products are used to provide a barrier between the semiconductor device and the surrounding environment, ensuring the device remains protected from contaminants. Especially UPT continually develop new FFKM (perfluoro elastomers) compounds depending on various process conditions for CVD, Etch, PVD, ALD, Diffusing and wet process with top-nauch technically that enhancing the performance from physical stress, thermal expansion, and etching resistance. Currently new compounds are focusing on less contamination materials excluding typical metallic contents or inorganic fillers.