Legacy Semiconductor

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Legacy Semiconductor is a leading re-manufacturer of plasma etch systems used in the semiconductor industry. Specializing in Tegal 901e, Tegal 903e oxide, nitride and polysilicon etchers along with single & batch wafer resist strippers/asher such as the Tegal 915 system. We also carry a complete line of new spares & repair parts at prices well below that of the OEM.
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