Mechanical Characterization Laboratory (MCL)

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Research in MCL is specialized in MEMS/NEMS design, nanopatterning and nanofabrication, mechanical property measurement at micro and nanoscale, nano/bio interfaces and molecular diagnostics via MEMS sensors. Current projects address batch-compatible fabrication of Si nanowires and development of integration philosophies of these nanowires with micro electromechanical systems, nanowire resonators, development of resonant microcantilever-based sensors and characterization of the scale-dependence of mechanical properties.
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