Alexey Denisov Email and Phone Number

Developing Institute’s research infrastructure across all target domains

Overseeing and ensuring timely and efficient implementation of Skoltech strategy on shared facilities, including:- Advanced Imaging- FabLab and Machine Shop- Micro- and Nanofabrication Cleanroom Facility- HPC Data Center- Genomics- BioImaging and Spectroscopy- Mass Spectrometry

Part of the team building the new 133k sqm campus for Skolkovo Institute of Science and Technology – a brand new research and education university near Moscow, hosting 9 CREIs (Centers for Research, Education and Innovation) and more than 60 laboratories in the fields of IT, Biomedicine, Energy, Space, and Crosscutting Sciences as well as shared facilities.

Main activities:* Organizing and planning R&D activities in the Center; discovering new R&D areas and potential projects* Developing and implementing technological processes as well as technological documentation and workflows* Developing / leading the development of technological processes of wet chemical etching and surface treatment, i-line, laser, and e-beam lithography, dry plasma etching, and chemical vapor deposition* Developing acceptance programs and protocols of technological and metrological equipment; taking part in factory and site acceptance tests* Taking part in the project of designing and building cleanroom areas and all required infrastructure subsystems (2000 m^2 in total)* Taking part in team building, including activities in educating and preparing young specialists* Selecting and acquiring technological and metrological equipment according to the R&D activities in the Center

Main activities:* Team leader of a lithography group* Process development (projection lithography) for electron optics MEMS elements* Manufacturing of electron optics MEMS elements (lithography, wet and dry etching, thin films)* SPC and yield analysisOutcome:* Started-up a 0.28um node i-line projection lithography for MEMS applications at a newly built factory in Russia

Thesis: "Stepper microactuators driven by ultrasonic power transfer"Main activities and outcome:* Proposed and successfully developed from initial concept to a final prototype an ultrasonically powered MEMS actuator as a potential replacement to batteries in biomedical implants (drug delivery systems)* Developed analytical and numerical models of acoustic wave propagation in different media, acoustically coupled mechanical oscillators, and stepper mechanisms driven by impact actuation* Developed and implemented a novel process for the microfabrication of the proposed system* Designed and built an experimental setup and successfully demonstrated the possibility of wireless power delivery and remote actuation of mechanical systems through ultrasound

Thesis: “Conception of specific micro-pump for syringe without piston”Main activities and outcome:* Proposed and developed MEMS reciprocating micropump with bimetallic actuation for a novel drug delivery system aimed at automatic and secure injections or blood sampling* Developed analytical and numerical models to analyse thermo- / electro-mechanical behaviour of the micropump, its discharge stroke, and the output flow rate* Developed process flow for the fabrication and quality control of the micropump prototype and planned experiments for its characterization

* Developed modular system to demonstrate the concept of using photon counting detectors in a MEMS spectrometer for fluorescence applications

* Co-developed novel three-layer thin film structure for a miniature Fabry-Perot interference filter

* Performed surface quality control measurements of various materials for medical (dentistry), automotive (electrochromic mirrors), machining (instrument coatings), and manufacturing (CD/DVD) industries with atomic force and scanning tunnelling microscopy