EUV Source

My graduation project is at ASML in Wafer Stage Control group. I am focussing on the compliance compensation control strategy. This strategy should make it possible to better determine the compliance compensation and make it machine specific. Firstly, I want to describe the position dependent compliance using polynominals. Thereafter, I will do simulations to test time domain optimization approaches to find the polynominal's optimal coefficients. And finally, I want to test this on a real… Show more My graduation project is at ASML in Wafer Stage Control group. I am focussing on the compliance compensation control strategy. This strategy should make it possible to better determine the compliance compensation and make it machine specific. Firstly, I want to describe the position dependent compliance using polynominals. Thereafter, I will do simulations to test time domain optimization approaches to find the polynominal's optimal coefficients. And finally, I want to test this on a real machine. Show less

As part of my Master at the Eindhoven University of Technology, I have done a traineeship at TNO Eindhoven at the Equipment for Additive manufacturing department. I have been working on a stereolithography 3D-printer, which builds an object by stacking layers on top of each other. The quality of this process is highly dependent upon recoating properties, such as velocity, pressure and fluid level. It was my job to characterize these dependencies and make improvements for optimal performance.