Director Of Optical Engineering
CurrentManaged large team of Optics Design and Optics Lifetime Engineers to develop next generation optical systems which are capable of propagating extreme high fluence DUV laser power to produce uniform illumination pattern onto wafer surface for scatterometry measurements of particles, haze, and other natural surface defects on bare wafer inspection systems. Also managed development of phase contrast and and autofocus systems capable of achieving extremely small step height resolutions as well as stable focus height error control loops for maintaining 0.97NA objective image quality without being affected by changes in thermal or ambient pressure environment.