Pioneering semiconductor metallization expert and industry leader with extensive management and technical experience in process technology roadmaps, fab deposition equipment, taskforce management, training, process integration, process development, and manufacturing.
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Content CreatorFreelanceHillsboro, Or, Us
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Sr. Principal Engineer In Ltd FoundryIntel Corporation Mar 2022 - PresentHillsboro, Oregon, United StatesAs the most senior metallization expert at Intel, envisioned and led initiatives in novel materials and integration flows in nodes from pathfinding to production to improve power, performance, and price.• Co-chair of the Integrated Module/Patterning Advanced Component Technology meeting, for Director level review of Foundry TD roadmaps for Intel 4 through 14A, and beyond. • Core member of the Intel LTD Industry Forum for Technology which drives alignment between equipment supplier development roadmaps with Intel’s silicon technology roadmap. -
Ltd Cvd Metals Engineering ManagerIntel Corporation Mar 2020 - Mar 2022Hillsboro, Oregon, United StatesLed 5 different Chemical Vapor Deposition groups doing advanced node development for contact metallization, gate fill, work function metal, local interconnect fill, via fill, as well as novel memory layers. • Managed combined D1 (TD and Manufacturing) advanced metals groups totaling 40+ engineers.• Chair of Advanced Module Review meeting for Director review of Thin Films/CMP roadmaps. -
Principal Engineer In Ltd MetalsIntel Corporation Jan 2018 - Mar 2020Hillsboro, Oregon, United StatesChair of P1276 Metal Gate Focus Team from pathfinding through to Intel3 production. Initiated a Thin Films/Planar department training effort in support of LTD wide cultural reset effort. • Led taskforces to select and develop new metal gate materials/integration schemes for Intel4/3.• Created and taught training classes on topics such as: Intel’s process flows, CVD deposition, plasma processing, SRAM devices, career development, and semiconductor industry history. -
Group Leader Of Ltd Cvd Interconnect GroupIntel Corporation Jun 2015 - Dec 2017Hillsboro, Oregon, United StatesLed group that delivered the first HVM implementation of cobalt local interconnect at the 10nm node. • Led selection and development of first in industry high throughput CVD metals equipment. • Led internal development of proprietary PE CVD/ALD barrier/liner to enable Co integration. -
Group Leader Of Ltd Front-End MetalsIntel Corporation Mar 2006 - Jun 2015Hillsboro, Oregon, United StatesLed group that owned all LTD front-end metallization module development -- Metal gate, silicide, and local tungsten interconnect for Intel’s 45nm, 32nm, 22nm, and 14nm nodes. • Directly managed a pilot line fleet of over $100M in metals deposition equipment which was successfully “Copied Exactly” across Intel’s factory network and ramped to HVM in each node.• Led taskforces to re-engineer the transistor source/drain contact and gate fill integration schemes required for the 3D “tri-gate” transistors used in Intel’s 22nm, 14nm, and 10nm nodes.• Invented scalable CVD metallization solutions to replace PVD metals in FinFET integration scheme: CVD W gate fill (used at 22nm) and conformal Ti wrap around contact (used at 10 nm). • Grew the group from 4 to 18 PhD engineers. Owned recruitment and candidate selection. -
Staff Engineer In Ltd MetalsIntel Corporation Mar 2004 - Mar 2006Hillsboro, Oregon, United StatesP1266 Metal Gate module/tool owner. Ran taskforces to establish process and tooling HVM readiness.• Developed a novel work function metal (WFM) and Atomic Layer Deposition barrier, as well as associated tooling for Intel’s 45nm node -- the world’s first HVM high-k metal gate technology.• Worked with suppliers to bring the industry’s first integrated PVD/ALD tools to HVM. -
Metals Sr. Process Engineer In Ptd MetalsIntel Corporation Mar 1997 - Mar 2004Hillsboro, Oregon, United StatesP860/1260/1264 Copper Barrier/Seed module/tool owner.• Module owner for Intel’s first Cu Barrier/Seed deposition process at the 0.13um node. • Selected 300mm Cu B/S process equipment and owned module development activity for the world’s first 300nm wafer size technology to ramp to high-volume manufacturing (HVM) “P1260”.• Led team to develop and qualify a second source supplier for Cu B/S equipment at 65nm.
Dan Bergstrom Education Details
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Materials Science
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Dan Bergstrom attended University Of Illinois At Urbana-Champaign.
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Dan Bergstrom's colleagues are Karen Dickinson, Jinhai Li, Zorin Zilberman, Brady Kinsman, Muhammad Shamasneh, Derrick Addo, Alessandro Boza Vargas.
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