Harold Philipsen Email & Phone Number

Leuven, Flemish Region, Belgium

Leuven, Flemish Region, Belgium

Development of electrodeposition processes for IMEC's 3D program(focusing on Through Silicon Vias (TSVs)) and metallization processes for Solar applications.

Wet-chemical etching of silicon is used in various industrial processes, e.g. in the production of MEMS (micro-electromechanical systems). The focus of the project was on the comparison of the (electro)chemistry of various crystallographic surfaces of silicon and gaining a better understanding.An important factor is the influence of additives, such as alcohols or oxidizing agents, which have profound effects on the (electro)chemistry and morphology of the various crystal surfaces. By… Show more Wet-chemical etching of silicon is used in various industrial processes, e.g. in the production of MEMS (micro-electromechanical systems). The focus of the project was on the comparison of the (electro)chemistry of various crystallographic surfaces of silicon and gaining a better understanding.An important factor is the influence of additives, such as alcohols or oxidizing agents, which have profound effects on the (electro)chemistry and morphology of the various crystal surfaces. By understanding these various influences on the etching process, a better control and reproducibility of the etching process can be achieved, which is pivotal when features are produced with nanometer-scale dimensions. Show less

Phd, Chemistry

Thesis title: Anisotropy in the surface chemistry of silicon in alkaline solution ========== Full text version of my PhD thesis is.

Ftir Spectroscopy Of Etching Si

6-month stay to perform in situ infrared (FTIR) spectroscopy of Si in alkaline solution.

M.Sc., Chemistry

Subject: study of hydrogen diffusion in yttrium, palladium, and gadolinium thin films, using electrochemical methods.

B.Sc., Analytical Chemistry

6-month internship at GE Plastics in Bergen op Zoom (The Netherlands). Subject: analysis of polymers with optical and scanning electron.