Researcher At Center For Quantum Devices (Cqd)
Dedicated to investigating ultra-wide bandgap semiconductors, with a primary focus on novel metal oxides (i.e. Ga2O3) and a secondary interest in III-Nitrides (i.e. AlN, AlGaN, GaN) using epitaxial growth techniques, particularly metalorganic chemical vapor deposition (MOCVD). (a)Conceptualization and Method Developments to produce High-quality Epitaxial Ga2O3 Films•Examined and analyzed the effects of MOCVD growth parameters such as growth temperature, pressure and different precursors to produce epitaxial Ga2O3 layers with low defect density; Introduced novel techniques, including Ga pre-deposition, the usage of indium as an effective surfactant, and the incorporation of β-Ga2O3 buffer layer to mitigate defect formation during MOCVD growth.(b)Direct Epitaxial Synthesis of Ga2O3/III-Nitrides Heterostructures •Introduced AlOx interlayer method to facilitate the epitaxial growth of Ga2O3/III-Nitride heterostructures, overcoming the challenge of large lattice mismatch between the two material systems and effectively addressing the poor heat conductivity of Ga2O3. (c)Investigation on the Chemical Dynamics in the course of Epitaxial Ga2O3 Growth •Explored and assessed the influence of hydrogen (H2) and nitrogen (N2) on MOCVD-grown Ga2O3 epilayers; The quantity of H2 plays a pivotal role in determining both the quality and polymorph of Ga2O3, while the presence of N2 induces p-type conductivity in Ga2O3 as a dopant. (d)Evaluation and Analysis of Epitaxial Layers through Various Characterization Techniques •Investigated and analyzed MOCVD-grown epilayers through comprehensive structural, optical, and electrical characterization measurement techniques including Atomic Force Microscope (AFM), Scanning Electron Microscope (SEM), High resolution X-ray Diffraction (HR-XRD), Energy-dispersive X-ray spectroscopy (EDX), Photoluminescence (PL), Optical Transmission Measurement, Hall Effect Measurement.