Equipment Engineering Technician
Current20+ years semiconductor industry. Business groups Dallas Heater Chip (DHC), Kilby Center (KFAB), SPL/SPDC.Equipment support for Plasma Etch, PVD, and CVD systems: 200mm AMAT Centura 5200 (DPS, MxP, MxP+, ASP+ ), AMAT P-5000 CVD, 300mm Amat Centura AP (DPSII & Axiom chambers), Tel Unity DRM, Lam Exelan and 4528, Lam Rainbows, Fusion Gemini ashers, Mattson 200mm & 300mm ashers (ICP & Highlands). TEL/MRC sputter tools, Novellus CVD tools, Oerlikon PVD, Ulvac PVD, Trikon Etch tools. NetDaq data acquisition, Ferran Micropole residual gas analysis.Other responsibilities:Previous experience in semiconductor research and development environments - SPL/SPDC and Kilby Center at TI. Was part of SPDC/Kilby Center transition team.parts setup, parts lists, lessons learned, communication, equipment procedures, tool failure failure analysis, tool installs, provided training for other technicians.
