Fabricated Realistic Large-Scale Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays for Ultrasound Medical Applications including Multi-Frequency, Multi-Gap Multi-Frequency, and Flexible Multi-Frequency CMUT Arrays.[1] Mask Design Programs: Designed photomasks using L-Edit and AutoCAD programs for making large-scale realistic multi-frequency and multi-gap multi-frequency CMUT arrays.[2] Lithography: Contactless (maskless) lithography, Contact mode UV photolithography, positive and negative photoresist coating and baking, rehydration and mask aligner. PDMS Masters with SU8. [3] Wafer Preparation: Piranha Cleaning and Buffered oxide etch (BOE).[4] Dry Etching: RIE and DRIE.[5] Wet Etching: Metal etching, SiO2 (BOE) and Si (KOH and TMAH).[6] Deposition: ALD, LPCVD nitride and Poly-Si, PECVD SiO2 and nitride, Metal sputtering, Parylene and PDMS coating.[7] Evaporation: HfO2 deposition as a high-K dielectric insulation layer.[8] Other: Critical point dryer (CPD), thermal and dry oxidation, HMDS, annealing after metal deposition, KOH resistant photoresist as a protection and adhesive layer, Fusion bonding and annealing.[9] Characterization Tools: AFM, Laser Doppler Vibrometer (LDV), Wedge and ball Wire-Bonder for connecting the transducers to custom PCB boards using gold wires, Vector network analyzer (VNA), Thin film stress measurement, Zygo optical profilometer, Three- and Four-point probe station, Scanning Electron Microscopy (SEM), Helium Ion Microscopy (HIM) equipped with a Ga focused ion beam (FIB) column for massive material removal, Verasonics ultrasound platform for ultrasound imaging, Alpha-step IQ (profilometer), Filmetrics, Optical microscopes.

[1] Lab Instructor of Micro-fabrication Devices (ECE457) at NanoFAB; The nanoFAB is a national, open-access training, service, and collaboration centre at University of Alberta, focused on academic and industrial applications in micro- and nanoscale fabrication and characterization.[2] Lab Developer and Lab Instructor of Biophysical Measurement and Instrumentation (ECE405); The nanoFAB is a national, open-access training, service, and collaboration centre at University of Alberta, focused on academic and industrial applications in micro- and nanoscale fabrication and characterization.[3] Lab Teaching Assistant (TA) of Capstone Design for Electrical Engineers (ECE490/491); The nanoFAB is a national, open-access training, service, and collaboration centre at University of Alberta, focused on academic and industrial applications in micro- and nanoscale fabrication and characterization.[4] Lab Teaching Assistant (TA) of Integrated Circuit Design (ECE403); The nanoFAB is a national, open-access training, service, and collaboration centre at University of Alberta, focused on academic and industrial applications in micro- and nanoscale fabrication and characterization.

-Integrated Circuit Design for Flip-Chip Bonded Capacitive Micromachined Ultrasonic Transducers (CMUT)-Interface Electronics for Ultrasound 3D Imaging and Therapeutic Applications-Prepared some educational tutorials for CADENCE, TANNER EDA and OrCAD PSpice-Involved in training CADENCE and TANNER EDA for lab members

* Designer and manufacturer of many kinds of circuits* Instructor of PIC and AVR Microcontrollers