Shaoyu Wang Email and Phone Number

RD Director

1.Assist the department manager in charge of R&D,Review the R&D projects technical proposals and supervise the R&D process2.As lead mechanical engineer to be responsible for technical management of two machinery business group3.As a project manager to be responsible for project and technical management of the 3 department independent projects

1.Nov 2011 to Present.Led 3 projects development. Wafer handling system project of 45 nm and 90nm scan lithography machine which belong to National Science and Technology Major Project and Wafer handling robot R&D project.2.May 2011 to OCT 2013.Finished the projects that 2 to 6 inches substrates handling system project of LED lithography.Developed 8 sets and delivered 3 sets,the output value is 8,600,000. The first machine was delivered to Epilight Technology for LED PSS manufactured and others to Guangdong and Taiwan LED fab.The LED lithography won the fifteen Industry Expo bronze medal and Shanghai patent new products in 2013.

1.Jul 2008 to Apr 2010.Independently designed the loadport that was the man-machine interface with the semiconductor machine .The loadport were developed by 5 servo and 1 pneumatic axes that used to operate the FOUP in Z and y directions,open the FOUP and detect the wafers information.Including 25 sensors that used to be the motion home/e-limit,the wafer and FOUP position detecting and other safety functions.Worked with the software engineer to design the initialized,terminated and other function process based on the hardware principle.The loadport cost reduced by 50% to 200,000 RMB and replaced the import machine.The loadport equipment had been participated in national 11th five-year science-technology achievements exhibition with the lithography machine prototype.2.Apr 2009 to Oct 2010.As a mechanical group leader completed the material handing system mechanical design that belonged to 11th five-year plan National Science and Technology Major Project.Designed the Second Pre-alignment MVS to identify the edge of the wafer and calculate its positon error to be used to calibrate.Designed Straight exchange arm with linear motor,grating ruler and special guide.Completed 600 the first made motion system DEMO with mechanism simulate tool in the company.As a integrated team leader guided the assembly, electrical and software engineers to assemble,integrate and test all the modules of the system.Now the system had been delivered for 3 sets of a total 7 sets.3.Oct 2010 to Apr 2011.As a mechanical group leader to optimize loadport from cost and reliability to be general modular equipment which would be integrated into all automation systems of out company.Then the loadports were produced more than 40 sets (and create value 8,000,000RMB) and sold into 4 fabs (some to Taiwan)with lithography machine. the loadport with the lithography machine won the Shanghai Science and Technology Invention Prize two and the Fourteenth Industry Expo Gold Prize

1.Dec 2012 to to Present.Led to design the lithography machine automation materials transfer system of 12th five-year plan National Science and Technology Major Project,developed the wafer temperature control and air-bearing unit, line and surface composite MVS calibration unit, heavy load robot, developed more than 6 pieces of key techniques etc.2.Responsible for the department core design of Cylindrical coordinate robot. Designed the single arm robot mechanical structure,finished the system integration. the reliability test had been doing.Developed the heavy load and high precision robot cooperated with America company MILARA.Drafted and signed the EPS and ATP documents with MILARA.The robot had been outsourced manufacturing.Had experience in international cooperation team work.　　　3.Responsible for the department tooling and test bench,finished 2 production projects integrated tooling and test benches.4.Based on the patent, the SEMI standard, competitor on the market analysis, followed the technic trend.Reviewed all the mechanical design and schemes of department specific automation system , there was no technical solution errors that leaded to project failure and patent infringement.5.Be versed in semi factory automation R&D and know the technic process,based on the project application and by means of selection and customization of automatic parts with the Harmonic, Iko, Gates, Kss, Aerolas, Intellidrives, Parker, Maxon, Technotion, Renishaw, Kollmorgen and other dozens of suppliers,worked with some of them, integrated the resources to complete high quality automation system.Responsible for the imported key parts requirements control and evaluation, developed and reviewed the technical agreement and the ATP test file.6.Established the machinery group that expanded from 5 to 15 engineers, trained new engineers,brought up 1 mechanical leader and 1 reserve, 2 project managers;7.Reviewed the mechanical drawings and technical documents.